inventoryKey

	um	micrometres

	Res	Resistivity (in ohm-cm)

	DSP	Double side polished

	SSP	Single side polished

	Notes:

	Buried implant:	(e.g. Boron, 4E15, 25KeV) Dopant, Dose, Energy

	Final field oxide:	(e.g. 2000A +/-200A) Trench sidewall liner