SOI Inventory Table Key

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  um micrometres
  Res Resistivity (in ohm-cm)
  DSP Double side polished
  SSP Single side polished
  Notes:
  Buried implant: (e.g. Boron, 4E15, 25KeV) Dopant, Dose, Energy
  Final field oxide: (e.g. 2000A +/-200A) Trench sidewall liner